%0 Thesis
%A Hanna, Roudy
%T Epitaxial Tunnel Junctions via Molecular Beam Epitaxy and Atomic Layer Deposition for Superconducting Qubits
%I RWTH Aachen
%V Masterarbeit
%M FZJ-2021-04441
%P 88p.
%D 2021
%Z Masterarbeit, RWTH Aachen, 2021
%F PUB:(DE-HGF)19
%9 Master Thesis
%U https://juser.fz-juelich.de/record/902653