000902653 001__ 902653
000902653 005__ 20211123141909.0
000902653 037__ $$aFZJ-2021-04441
000902653 1001_ $$0P:(DE-Juel1)185996$$aHanna, Roudy$$b0$$eCorresponding author$$ufzj
000902653 245__ $$aEpitaxial Tunnel Junctions via Molecular Beam Epitaxy and Atomic Layer Deposition for Superconducting Qubits$$f - 2021-11-02
000902653 260__ $$c2021
000902653 300__ $$a88p.
000902653 3367_ $$2DataCite$$aOutput Types/Supervised Student Publication
000902653 3367_ $$02$$2EndNote$$aThesis
000902653 3367_ $$2BibTeX$$aMASTERSTHESIS
000902653 3367_ $$2DRIVER$$amasterThesis
000902653 3367_ $$0PUB:(DE-HGF)19$$2PUB:(DE-HGF)$$aMaster Thesis$$bmaster$$mmaster$$s1637654163_26757
000902653 3367_ $$2ORCID$$aSUPERVISED_STUDENT_PUBLICATION
000902653 502__ $$aMasterarbeit, RWTH Aachen, 2021$$bMasterarbeit$$cRWTH Aachen$$d2021
000902653 536__ $$0G:(DE-HGF)POF4-5222$$a5222 - Exploratory Qubits (POF4-522)$$cPOF4-522$$fPOF IV$$x0
000902653 7001_ $$0P:(DE-Juel1)165984$$aSchüffelgen, Peter$$b1$$eThesis advisor$$ufzj
000902653 909CO $$ooai:juser.fz-juelich.de:902653$$pVDB
000902653 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)185996$$aForschungszentrum Jülich$$b0$$kFZJ
000902653 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)165984$$aForschungszentrum Jülich$$b1$$kFZJ
000902653 9131_ $$0G:(DE-HGF)POF4-522$$1G:(DE-HGF)POF4-520$$2G:(DE-HGF)POF4-500$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$9G:(DE-HGF)POF4-5222$$aDE-HGF$$bKey Technologies$$lNatural, Artificial and Cognitive Information Processing$$vQuantum Computing$$x0
000902653 9141_ $$y2021
000902653 920__ $$lyes
000902653 9201_ $$0I:(DE-Juel1)PGI-9-20110106$$kPGI-9$$lHalbleiter-Nanoelektronik$$x0
000902653 980__ $$amaster
000902653 980__ $$aVDB
000902653 980__ $$aI:(DE-Juel1)PGI-9-20110106
000902653 980__ $$aUNRESTRICTED