TY  - THES
AU  - Hanna, Roudy
TI  - Epitaxial Tunnel Junctions via Molecular Beam Epitaxy and Atomic Layer Deposition for Superconducting Qubits
PB  - RWTH Aachen
VL  - Masterarbeit
M1  - FZJ-2021-04441
SP  - 88p.
PY  - 2021
N1  - Masterarbeit, RWTH Aachen, 2021
LB  - PUB:(DE-HGF)19
UR  - https://juser.fz-juelich.de/record/902653
ER  -