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@MASTERSTHESIS{Hanna:902653,
      author       = {Hanna, Roudy},
      othercontributors = {Schüffelgen, Peter},
      title        = {{E}pitaxial {T}unnel {J}unctions via {M}olecular {B}eam
                      {E}pitaxy and {A}tomic {L}ayer {D}eposition for
                      {S}uperconducting {Q}ubits},
      school       = {RWTH Aachen},
      type         = {Masterarbeit},
      reportid     = {FZJ-2021-04441},
      pages        = {88p.},
      year         = {2021},
      note         = {Masterarbeit, RWTH Aachen, 2021},
      cin          = {PGI-9},
      cid          = {I:(DE-Juel1)PGI-9-20110106},
      pnm          = {5222 - Exploratory Qubits (POF4-522)},
      pid          = {G:(DE-HGF)POF4-5222},
      typ          = {PUB:(DE-HGF)19},
      url          = {https://juser.fz-juelich.de/record/902653},
}