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@ARTICLE{Martins:902975,
author = {Martins, H. P. and Conti, G. and Cordova, I. and Falling,
L. and Kersell, H. and Salmassi, F. and Gullikson, E. and
Vishik, I. and Baeumer, C. and Naulleau, P. and Schneider,
C. M. and Nemsak, S.},
title = {{N}ear total reflection x-ray photoelectron spectroscopy:
quantifying chemistry at solid/liquid and solid/solid
interfaces},
journal = {Journal of physics / D},
volume = {54},
number = {46},
issn = {0022-3727},
address = {Bristol},
publisher = {IOP Publ.},
reportid = {FZJ-2021-04721},
pages = {464002 -},
year = {2021},
abstract = {Near total reflection regime has been widely used in x-ray
science, specifically in grazing incidence small angle x-ray
scattering and in hard x-ray photoelectron spectroscopy
(XPS). In this work, we introduce some practical aspects of
using near total reflection (NTR) in ambient pressure XPS
and apply this technique to study chemical concentration
gradients in a substrate/photoresist system. Experimental
data are accompanied by x-ray optical and photoemission
simulations to quantitatively probe the photoresist and the
interface with the depth accuracy of ∼1 nm. Together, our
calculations and experiments confirm that NTR XPS is a
suitable method to extract information from buried
interfaces with highest depth-resolution, which can help
address open research questions regarding our understanding
of concentration profiles, electrical gradients, and charge
transfer phenomena at such interfaces. The presented
methodology is especially attractive for solid/liquid
interface studies, since it provides all the strengths of a
Bragg-reflection standing-wave spectroscopy without the need
of an artificial multilayer mirror serving as a standing
wave generator, thus dramatically simplifying the sample
synthesis.},
cin = {PGI-6},
ddc = {530},
cid = {I:(DE-Juel1)PGI-6-20110106},
pnm = {1212 - Materials and Interfaces (POF4-121)},
pid = {G:(DE-HGF)POF4-1212},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000695432300001},
doi = {10.1088/1361-6463/ac2067},
url = {https://juser.fz-juelich.de/record/902975},
}