%0 Conference Paper
%A Zhao, Qing-Tai
%A Liu, Mingshan
%A Junk, Yannik
%A Hartmann, Jean-Michel
%A Ikonic, Zoran
%A Costina, Ioan
%A Knoch, Joachim
%A Grützmacher, Detlev
%A Buca, Dan Mihai
%T High performance Vertical GeSn/Ge Nanowire GAA Transistors
%M FZJ-2021-04972
%D 2021
%B Advanced Metallization Conference 2021
%C 14 Oct 2021 - 15 Oct 2021, Virtual (Japan)
Y2 14 Oct 2021 - 15 Oct 2021
M2 Virtual, Japan
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/903266