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@INPROCEEDINGS{Zhao:903266,
author = {Zhao, Qing-Tai and Liu, Mingshan and Junk, Yannik and
Hartmann, Jean-Michel and Ikonic, Zoran and Costina, Ioan
and Knoch, Joachim and Grützmacher, Detlev and Buca, Dan
Mihai},
title = {{H}igh performance {V}ertical {G}e{S}n/{G}e {N}anowire
{GAA} {T}ransistors},
reportid = {FZJ-2021-04972},
year = {2021},
month = {Oct},
date = {2021-10-14},
organization = {Advanced Metallization Conference
2021, Virtual (Japan), 14 Oct 2021 - 15
Oct 2021},
subtyp = {Invited},
cin = {PGI-9},
cid = {I:(DE-Juel1)PGI-9-20110106},
pnm = {5234 - Emerging NC Architectures (POF4-523)},
pid = {G:(DE-HGF)POF4-5234},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/903266},
}