%0 Journal Article
%A Moskovkin, P.
%A Maszl, C.
%A Schierholz, Roland
%A Breilmann, W.
%A Petersen, J.
%A Pflug, A.
%A Muller, J.
%A Raza, M.
%A Konstantinidis, S.
%A von Keudell, A.
%A Lucas, S.
%T Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering
%J Surface and coatings technology
%V 418
%@ 0257-8972
%C Amsterdam [u.a.]
%I Elsevier Science
%M FZJ-2021-05344
%P 127235 -
%D 2021
%Z Kein Post-print vorhanden
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000655581500019
%R 10.1016/j.surfcoat.2021.127235
%U https://juser.fz-juelich.de/record/903695