TY - JOUR
AU - Moskovkin, P.
AU - Maszl, C.
AU - Schierholz, Roland
AU - Breilmann, W.
AU - Petersen, J.
AU - Pflug, A.
AU - Muller, J.
AU - Raza, M.
AU - Konstantinidis, S.
AU - von Keudell, A.
AU - Lucas, S.
TI - Link between plasma properties with morphological, structural and mechanical properties of thin Ti films deposited by high power impulse magnetron sputtering
JO - Surface and coatings technology
VL - 418
SN - 0257-8972
CY - Amsterdam [u.a.]
PB - Elsevier Science
M1 - FZJ-2021-05344
SP - 127235 -
PY - 2021
N1 - Kein Post-print vorhanden
LB - PUB:(DE-HGF)16
UR - <Go to ISI:>//WOS:000655581500019
DO - DOI:10.1016/j.surfcoat.2021.127235
UR - https://juser.fz-juelich.de/record/903695
ER -