%0 Journal Article
%A Baumgarten, Lutz
%A Szyjka, Thomas
%A Müller, Martina
%T Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO 2 films
%J Applied physics letters
%V 118
%N 3
%@ 0003-6951
%C Melville, NY
%I American Inst. of Physics
%M FZJ-2021-06145
%P 032903 -
%D 2021
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000630389700003
%R 10.1063/5.0035686
%U https://juser.fz-juelich.de/record/904575