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TY - JOUR AU - Baumgarten, Lutz AU - Szyjka, Thomas AU - Müller, Martina TI - Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO 2 films JO - Applied physics letters VL - 118 IS - 3 SN - 0003-6951 CY - Melville, NY PB - American Inst. of Physics M1 - FZJ-2021-06145 SP - 032903 - PY - 2021 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:000630389700003 DO - DOI:10.1063/5.0035686 UR - https://juser.fz-juelich.de/record/904575 ER -