TY  - JOUR
AU  - Baumgarten, Lutz
AU  - Szyjka, Thomas
AU  - Müller, Martina
TI  - Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO 2 films
JO  - Applied physics letters
VL  - 118
IS  - 3
SN  - 0003-6951
CY  - Melville, NY
PB  - American Inst. of Physics
M1  - FZJ-2021-06145
SP  - 032903 -
PY  - 2021
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000630389700003
DO  - DOI:10.1063/5.0035686
UR  - https://juser.fz-juelich.de/record/904575
ER  -