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@ARTICLE{Baumgarten:904575,
      author       = {Baumgarten, Lutz and Szyjka, Thomas and Müller, Martina},
      title        = {{I}mpact of vacancies and impurities on ferroelectricity in
                      {PVD}- and {ALD}-grown {H}f{O} 2 films},
      journal      = {Applied physics letters},
      volume       = {118},
      number       = {3},
      issn         = {0003-6951},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2021-06145},
      pages        = {032903 -},
      year         = {2021},
      cin          = {PGI-6},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-6-20110106},
      pnm          = {5211 - Topological Matter (POF4-521)},
      pid          = {G:(DE-HGF)POF4-5211},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000630389700003},
      doi          = {10.1063/5.0035686},
      url          = {https://juser.fz-juelich.de/record/904575},
}