Hauptseite > Publikationsdatenbank > Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO 2 films > print

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024 7 _ |a 10.1063/5.0035686
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100 1 _ |a Baumgarten, Lutz
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245 _ _ |a Impact of vacancies and impurities on ferroelectricity in PVD- and ALD-grown HfO 2 films
260 _ _ |a Melville, NY
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700 1 _ |a Szyjka, Thomas
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700 1 _ |a Müller, Martina
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773 _ _ |a 10.1063/5.0035686
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|t Applied physics letters
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