%0 Journal Article
%A Thakkar, Pooja
%A Guzenko, Vitaliy A.
%A Lu, Peng-Han
%A Dunin-Borkowski, Rafal E.
%A Abrahams, Jan Pieter
%A Tsujino, Soichiro
%T Fabrication of low aspect ratio three-element Boersch phase shifters for voltage-controlled three electron beam interference
%J Journal of applied physics
%V 128
%N 13
%@ 0021-8979
%C Melville, NY
%I American Inst. of Physics
%M FZJ-2022-00255
%P 134502 -
%D 2020
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000578520000002
%R 10.1063/5.0020383
%U https://juser.fz-juelich.de/record/904941