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000904941 1001_ $$00000-0002-4233-5218$$aThakkar, Pooja$$b0$$eCorresponding author
000904941 245__ $$aFabrication of low aspect ratio three-element Boersch phase shifters for voltage-controlled three electron beam interference
000904941 260__ $$aMelville, NY$$bAmerican Inst. of Physics$$c2020
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000904941 7001_ $$00000-0001-8454-8599$$aGuzenko, Vitaliy A.$$b1
000904941 7001_ $$0P:(DE-Juel1)167381$$aLu, Peng-Han$$b2$$ufzj
000904941 7001_ $$0P:(DE-Juel1)144121$$aDunin-Borkowski, Rafal E.$$b3$$ufzj
000904941 7001_ $$00000-0001-8216-1868$$aAbrahams, Jan Pieter$$b4
000904941 7001_ $$00000-0001-7401-7815$$aTsujino, Soichiro$$b5$$eCorresponding author
000904941 773__ $$0PERI:(DE-600)1476463-5$$a10.1063/5.0020383$$gVol. 128, no. 13, p. 134502 -$$n13$$p134502 -$$tJournal of applied physics$$v128$$x0021-8979$$y2020
000904941 8564_ $$uhttps://juser.fz-juelich.de/record/904941/files/2020-05-28_Manuscript_Tsujino_Thakkar.pdf$$yPublished on 2020-10-06. Available in OpenAccess from 2021-10-06.
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