TY  - JOUR
AU  - Thakkar, Pooja
AU  - Guzenko, Vitaliy A.
AU  - Lu, Peng-Han
AU  - Dunin-Borkowski, Rafal E.
AU  - Abrahams, Jan Pieter
AU  - Tsujino, Soichiro
TI  - Fabrication of low aspect ratio three-element Boersch phase shifters for voltage-controlled three electron beam interference
JO  - Journal of applied physics
VL  - 128
IS  - 13
SN  - 0021-8979
CY  - Melville, NY
PB  - American Inst. of Physics
M1  - FZJ-2022-00255
SP  - 134502 -
PY  - 2020
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000578520000002
DO  - DOI:10.1063/5.0020383
UR  - https://juser.fz-juelich.de/record/904941
ER  -