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@ARTICLE{Thakkar:904941,
      author       = {Thakkar, Pooja and Guzenko, Vitaliy A. and Lu, Peng-Han and
                      Dunin-Borkowski, Rafal E. and Abrahams, Jan Pieter and
                      Tsujino, Soichiro},
      title        = {{F}abrication of low aspect ratio three-element {B}oersch
                      phase shifters for voltage-controlled three electron beam
                      interference},
      journal      = {Journal of applied physics},
      volume       = {128},
      number       = {13},
      issn         = {0021-8979},
      address      = {Melville, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2022-00255},
      pages        = {134502 -},
      year         = {2020},
      cin          = {ER-C-1},
      ddc          = {530},
      cid          = {I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {5351 - Platform for Correlative, In Situ and Operando
                      Characterization (POF4-535) / Q-SORT - QUANTUM SORTER
                      (766970)},
      pid          = {G:(DE-HGF)POF4-5351 / G:(EU-Grant)766970},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000578520000002},
      doi          = {10.1063/5.0020383},
      url          = {https://juser.fz-juelich.de/record/904941},
}