%0 Journal Article
%A Xu, C.
%A Heinemeyer, F.
%A Dittrich, A.
%A Bäumer, C.
%A Reineke-Koch, R.
%T In situ spectroscopic ellipsometry as a pathway toward achieving VO 2 stoichiometry for amorphous vanadium oxide with magnetron sputtering
%J AIP Advances
%V 11
%N 3
%@ 2158-3226
%C New York, NY
%I American Inst. of Physics
%M FZJ-2022-00474
%P 035126 -
%D 2021
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000628809800002
%R 10.1063/5.0041116
%U https://juser.fz-juelich.de/record/905191