TY  - JOUR
AU  - Xu, C.
AU  - Heinemeyer, F.
AU  - Dittrich, A.
AU  - Bäumer, C.
AU  - Reineke-Koch, R.
TI  - In situ spectroscopic ellipsometry as a pathway toward achieving VO 2 stoichiometry for amorphous vanadium oxide with magnetron sputtering
JO  - AIP Advances
VL  - 11
IS  - 3
SN  - 2158-3226
CY  - New York, NY
PB  - American Inst. of Physics
M1  - FZJ-2022-00474
SP  - 035126 -
PY  - 2021
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000628809800002
DO  - DOI:10.1063/5.0041116
UR  - https://juser.fz-juelich.de/record/905191
ER  -