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@ARTICLE{Xu:905191,
      author       = {Xu, C. and Heinemeyer, F. and Dittrich, A. and Bäumer, C.
                      and Reineke-Koch, R.},
      title        = {{I}n situ spectroscopic ellipsometry as a pathway toward
                      achieving {VO} 2 stoichiometry for amorphous vanadium oxide
                      with magnetron sputtering},
      journal      = {AIP Advances},
      volume       = {11},
      number       = {3},
      issn         = {2158-3226},
      address      = {New York, NY},
      publisher    = {American Inst. of Physics},
      reportid     = {FZJ-2022-00474},
      pages        = {035126 -},
      year         = {2021},
      cin          = {PGI-7 / JARA-FIT},
      ddc          = {530},
      cid          = {I:(DE-Juel1)PGI-7-20110106 / $I:(DE-82)080009_20140620$},
      pnm          = {5233 - Memristive Materials and Devices (POF4-523)},
      pid          = {G:(DE-HGF)POF4-5233},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000628809800002},
      doi          = {10.1063/5.0041116},
      url          = {https://juser.fz-juelich.de/record/905191},
}