%0 Thesis
%A Aussen, Stephan
%T Microstructural control of sputtered transition metal oxide thin films for ReRAM applications
%I RWTH Aachen
%V Masterarbeit
%M FZJ-2022-00961
%P 100
%D 2017
%Z Masterarbeit, RWTH Aachen, 2017
%F PUB:(DE-HGF)19
%9 Master Thesis
%U https://juser.fz-juelich.de/record/905737