TY  - THES
AU  - Aussen, Stephan
TI  - Microstructural control of sputtered transition metal oxide thin films for ReRAM applications
PB  - RWTH Aachen
VL  - Masterarbeit
M1  - FZJ-2022-00961
SP  - 100
PY  - 2017
N1  - Masterarbeit, RWTH Aachen, 2017
LB  - PUB:(DE-HGF)19
UR  - https://juser.fz-juelich.de/record/905737
ER  -