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@ARTICLE{Bosan:906344,
author = {Bosan, Hassan Ali and Beyer, Wolfhard and Breuer, Uwe and
Finger, Friedhelm and Hambach, Nelli and Nuys, Maurice and
Pennartz, Frank and Amkreutz, Daniel and Haas, Stefan},
title = {{I}nvestigation of {T}hermal {S}tability {E}ffects of
{T}hick {H}ydrogenated {A}morphous {S}ilicon {P}recursor
{L}ayers for {L}iquid‐{P}hase {C}rystallized {S}ilicon},
journal = {Physica status solidi / A},
volume = {218},
number = {9},
issn = {0031-8965},
address = {Weinheim},
publisher = {Wiley-VCH},
reportid = {FZJ-2022-01382},
pages = {2000435 -},
year = {2021},
abstract = {The thermal stability of thick (≈4 μm) plasma-grown
hydrogenated amorphous silicon (a-Si:H) layers on glass upon
application of a rather rapid annealing step is
investigated. Such films are of interest as precursor layers
for laser liquid-phase crystallized silicon solar cells.
However, at least half-day annealing at T ≈550 °C is
considered to be necessary so far to reduce the hydrogen (H)
content and thus avoid blistering and peeling during the
crystallization process due to H. By varying the deposition
conditions of a-Si:H, layers of rather different thermal
stability are fabricated. Changes in the surface morphology
of these a-Si:H layers are investigated using scanning
electron microscopy and profilometry measurements. Hydrogen
effusion, secondary-ion mass spectrometry (SIMS) depth
profiling, and Raman spectroscopy measurements are also
carried out. In summary, amorphous silicon precursor layers
are fabricated that can be heated within 30 min to a
temperature of 550 °C without peeling and major surface
morphological changes. Successful laser liquid-phase
crystallization of such material is demonstrated. The
physical nature of a-Si:H material stability/instability
upon application of rapid heating is studied.},
cin = {IEK-5},
ddc = {530},
cid = {I:(DE-Juel1)IEK-5-20101013},
pnm = {1212 - Materials and Interfaces (POF4-121)},
pid = {G:(DE-HGF)POF4-1212},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000635242400001},
doi = {10.1002/pssa.202000435},
url = {https://juser.fz-juelich.de/record/906344},
}