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@ARTICLE{Sackers:907533,
      author       = {Sackers, M. and Busch, Carsten and Tsankov, Ts. V. and
                      Czarnetzki, U. and Mertens, Ph. and Marchuk, O.},
      title        = {{P}lasma parameters and tungsten sputter rates in a
                      high-frequency {CCP}},
      journal      = {Physics of plasmas},
      volume       = {29},
      number       = {4},
      issn         = {1070-664X},
      address      = {[S.l.]},
      publisher    = {American Institute of Physics},
      reportid     = {FZJ-2022-02066},
      pages        = {043511 -},
      year         = {2022},
      abstract     = {Monitoring and investigating the fusion plasma in ITER will
                      be crucial to pave the way to a fusion power plant. However,
                      the harsh conditions in the vacuum vessel are detrimental
                      for the optical diagnostics systems. Replacing the element
                      with a direct line of sight to the fusion plasma by a
                      metallic mirror shifts the problem to this component. The
                      flux of impurities onto these mirrors accumulate to
                      deposits, which degrade their optical properties over time.
                      It has been proposed to address this issue by igniting
                      discharges in front of the mirrors during the maintenance
                      phases allowing the deposited material to be sputtered away
                      and recover the mirror properties. To further the knowledge
                      for such an option, in this work, plasma parameters and
                      sputter rates in a high-frequency (60 MHz) capacitive
                      discharge in argon at pressures below 10 Pa are studied.
                      The powered electrode consists of tungsten as a cheap
                      rhodium proxy—the material of the metallic mirrors in
                      ITER—and to simulate tungsten deposition. Its size is
                      equivalent to a mirror for charge-exchange recombination
                      spectroscopy at ITER (8.5 cm × 18 cm). The
                      discharge is studied using and interpreting voltage
                      measurements, microwave interferometry, electrical probe
                      measurements, and optical emission spectroscopy. These
                      investigations provide the opportunity to identify the
                      optimal conditions for the process based on various
                      requirements, such as damage threshold of the mirror crystal
                      and severity and type of contamination.},
      cin          = {IEK-4},
      ddc          = {530},
      cid          = {I:(DE-Juel1)IEK-4-20101013},
      pnm          = {134 - Plasma-Wand-Wechselwirkung (POF4-134)},
      pid          = {G:(DE-HGF)POF4-134},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000791279200003},
      doi          = {10.1063/5.0083613},
      url          = {https://juser.fz-juelich.de/record/907533},
}