%0 Patent
%A Berneking, Arne
%A Shah, N. J.
%A Lerche, Christoph
%T Sensor chip
%M FZJ-2022-02781
%@ US11054533B22021-07-06
%D 2021
%F PUB:(DE-HGF)23
%9 Patent
%N US201716311753A2017-06-20
%U https://juser.fz-juelich.de/record/908712