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@ARTICLE{Artanov:909782,
author = {Artanov, Anton A. and Gutierrez-D, Edmundo A. and Cabrera
Galicia, Alfonso Rafael and Kruth, Andre and Degenhardt,
Carsten and Durini, Daniel and Mendez-V, Jairo and Van
Waasen, Stefan},
title = {{S}elf-{H}eating {E}ffect in a 65 nm {MOSFET} at
{C}ryogenic {T}emperatures},
journal = {IEEE transactions on electron devices},
volume = {69},
number = {3},
issn = {0018-9383},
address = {New York, NY},
publisher = {IEEE},
reportid = {FZJ-2022-03412},
pages = {900 - 904},
year = {2022},
abstract = {We characterized the thermal behavior of a 65 nm bulk CMOS
transistor, by measuring the self-heating effect (SHE) as a
function of bias condition. We demonstrated that at a base
temperature of 6.5 K the channel temperature of the
transistor can increase up to several tens of kelvins due to
power dissipation. The thermal behavior of the transistor is
determined not only by the thermal response of the
transistor itself but also by the thermal properties of the
surroundings, i.e., source, drain, bulk, and gate
interfaces, metal contacts, and vias. On top of it, the
thermal response is bias-dependent through bias dependence
of power and self-heating. This information becomes relevant
for proper design of integrated circuits for quantum
computing or other cryogenic applications, where the
circuitry requires to be operated at a stable cryogenic
temperature.},
cin = {ZEA-2},
ddc = {620},
cid = {I:(DE-Juel1)ZEA-2-20090406},
pnm = {5223 - Quantum-Computer Control Systems and Cryoelectronics
(POF4-522)},
pid = {G:(DE-HGF)POF4-5223},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000742676600001},
doi = {10.1109/TED.2021.3139563},
url = {https://juser.fz-juelich.de/record/909782},
}