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@ARTICLE{Schmidt:910064,
author = {Schmidt, Niclas and Rushchanskii, Konstantin Z. and
Trstenjak, Urška and Dittmann, Regina and Karthäuser,
Silvia},
title = {{I}n-{G}ap {S}tates of {H}f{O} 2 {N}anoislands {D}riven by
{C}rystal {N}ucleation: {I}mplications for {R}esistive
{R}andom-{A}ccess {M}emory {D}evices},
journal = {ACS applied nano materials},
volume = {6},
number = {1},
issn = {2574-0970},
address = {Washington, DC},
publisher = {ACS Publications},
reportid = {FZJ-2022-03592},
pages = {148-159},
year = {2023},
abstract = {Envisioned extremely scaled, high-performance memory
devices request to conduct the step from thin semiconductor
films to nanoscale structures and the use of promising
high-k materials such as hafnium oxide (HfO2). HfO2 is well
suited for use in resistive random-access memory (ReRAM)
devices based on the valence change mechanism. Here, we
provide a decidedly scaled system, namely, HfO2 nanoislands
that are grown by van der Waals epitaxy on highly oriented
pyrolytic graphite (HOPG). The electronic and structural
properties of these well-separated, crystalline HfO2
nanoislands are investigated by scanning probe methods as
well as ab initio methods. The topography reveals
homogeneously formed HfO2 nanoislands with areas down to 7
nm2 and a thickness of one unit cell. They exhibit several
acceptor- and donor-like in-gap states in addition to the
bulk band gap, implying bulk properties. X-ray photoelectron
spectroscopy indicates hafnium carbide formation as one
possible origin for defect states. Going further to the
crystal nucleation of HfO2, nanocrystals with a diameter of
2.7–4.5 Å are identified next to carbon vacancies in the
topmost HOPG layer, indicating that carbon is incorporated
into the islands at early nucleation stages. A precise
description of these nuclei is accomplished by the
simulation of small HfmOn(:C) clusters (m = 3 to 10; n = 3
to 22) with and without carbon incorporation using ab initio
methods. The comparison of the theoretically determined
lowest-energy clusters and electronic states with the
experimental results allows us to identify the structure of
the most relevant HfO2 sub-nanometer crystals formed during
the first nucleation steps and the nature of the in-gap
states found at the surfaces of HfO2 nanoislands. That way,
a model system is derived that consists of distinct
structural units, related to surface states or defect
states, respectively, that will promote the tailoring of
in-gap states of smallest HfO2 structures and thus the
scalability of memory devices.},
cin = {PGI-7 / IAS-1 / PGI-1 / JARA-FIT},
ddc = {540},
cid = {I:(DE-Juel1)PGI-7-20110106 / I:(DE-Juel1)IAS-1-20090406 /
I:(DE-Juel1)PGI-1-20110106 / $I:(DE-82)080009_20140620$},
pnm = {5233 - Memristive Materials and Devices (POF4-523) / DFG
project 167917811 - SFB 917: Resistiv schaltende
Chalkogenide für zukünftige Elektronikanwendungen:
Struktur, Kinetik und Bauelementskalierung "Nanoswitches"
(167917811)},
pid = {G:(DE-HGF)POF4-5233 / G:(GEPRIS)167917811},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000877146000001},
doi = {10.1021/acsanm.2c04165},
url = {https://juser.fz-juelich.de/record/910064},
}