001     910086
005     20221027130516.0
037 _ _ |a FZJ-2022-03605
041 _ _ |a English
100 1 _ |a Junk, Yannik
|0 P:(DE-Juel1)185010
|b 0
|e Corresponding author
111 2 _ |a 241st ECS Meeting
|c Vancouver
|d 2022-05-29 - 2022-06-02
|w Canada
245 _ _ |a Vertical GeSn/Ge Heterostructure Gate-All-Around Nanowire p-MOSFETs
260 _ _ |c 2022
336 7 _ |a Conference Paper
|0 33
|2 EndNote
336 7 _ |a Other
|2 DataCite
336 7 _ |a INPROCEEDINGS
|2 BibTeX
336 7 _ |a conferenceObject
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336 7 _ |a LECTURE_SPEECH
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336 7 _ |a Conference Presentation
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|s 1666867801_25413
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|x Panel discussion
520 _ _ |a A process for the fabrication of vertical gate-all-around (GAA) nanowire p-FETs with diameters of down to 20 nm based on Ge and GeSn/Ge-heterostructures is presented. The resulting Ge-based devices exhibit a low subthreshold slope (SS) of 66 mV/dec, a low drain-induced barrier lowering of 35 mV/V and an Ion/Ioff-ratio of 2.1×10^6 for devices with a diameter of 20 nm. Using a GeSn/Ge-heterostructure with GeSn as the top layer and source of the device, the on-current was increased by ~32%. With these results the high potential of incorporation of GeSn into Ge-MOSFET technology is demonstrated.
536 _ _ |a 5234 - Emerging NC Architectures (POF4-523)
|0 G:(DE-HGF)POF4-5234
|c POF4-523
|f POF IV
|x 0
700 1 _ |a Liu, Mingshan
|0 P:(DE-HGF)0
|b 1
700 1 _ |a Frauenrath, Marvin
|0 P:(DE-HGF)0
|b 2
700 1 _ |a Hartmann, Jean-Michel
|0 P:(DE-HGF)0
|b 3
700 1 _ |a Grützmacher, Detlev
|0 P:(DE-Juel1)125588
|b 4
700 1 _ |a Buca, Dan Mihai
|0 P:(DE-Juel1)125569
|b 5
700 1 _ |a Zhao, Qing-Tai
|0 P:(DE-Juel1)128649
|b 6
909 C O |o oai:juser.fz-juelich.de:910086
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913 1 _ |a DE-HGF
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914 1 _ |y 2022
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980 _ _ |a conf
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980 _ _ |a UNRESTRICTED


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