TY - CONF AU - Junk, Yannik AU - Frauenrath, Marvin AU - Han, Yi AU - Concepción Díaz, Omar AU - Bae, Jin Hee AU - Hartmann, Jean-Michel AU - Grützmacher, Detlev AU - Buca, Dan Mihai AU - Zhao, Qing-Tai TI - GeSn Vertical Gate-all-around Nanowire n-type MOSFETs M1 - FZJ-2022-03606 SP - 364-367 PY - 2022 AB - Vertical GeSn gate-all-around (GAA) nanowire nMOSFETs fabricated using a top-down approach are presented. The devices are benchmarked with similar Ge and Ge/GeSn/Ge heterostructure devices to underline the great potential of GeSn for future nMOS devices. Device measurements are performed in the temperature range from 12 K to room temperature (RT, 300 K). At RT the all-GeSn n-MOSFETs show a subthreshold swing (SS) of ~120 mV/dec that decreases at cryogenic temperatures to a very steep 20mV/dec. The abrupt transition from subthreshold to on-state shows the suitability of GeSn alloys for cryogenic CMOS applications. T2 - IEEE 52nd European Solid State Device Research Conference CY - 19 Sep 2022 - 22 Sep 2022, Milan (Italy) Y2 - 19 Sep 2022 - 22 Sep 2022 M2 - Milan, Italy LB - PUB:(DE-HGF)8 UR - https://juser.fz-juelich.de/record/910087 ER -