% IMPORTANT: The following is UTF-8 encoded. This means that in the presence % of non-ASCII characters, it will not work with BibTeX 0.99 or older. % Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or % “biber”. @ARTICLE{Bui:910522, author = {Bui, Minh and Rost, Stefan and Auge, Manuel and Tu, Jhih-Sian and zhou, lanqing and Aguilera, Irene and Blügel, Stefan and Ghorbani-Asl, Mahdi and Krasheninnikov, Arkady V. and Hashemi, Arsalan and Komsa, Hannu-Pekka and Jin, Lei and Kibkalo, Lidia and O’Connell, Eoghan N. and Ramasse, Quentin M. and Bangert, Ursel and Hofsäss, Hans C. and Grützmacher, Detlev and Kardynal, Beata}, title = {{L}ow-energy {S}e ion implantation in {M}o{S}2 monolayers}, journal = {npj 2D materials and applications}, volume = {6}, number = {1}, issn = {2397-7132}, address = {London}, publisher = {Nature Publishing Group}, reportid = {FZJ-2022-03905}, pages = {42}, year = {2022}, note = {Volkswagenstigftung project 93425 "New single photon sources by engineering monolayer-thick semiconductors on the atomic scale".}, abstract = {In this work, we study ultra-low energy implantation into MoS2 monolayers to evaluate the potential of the technique in two-dimensional materials technology. We use 80Se+ ions at the energy of 20 eV and with fluences up to 5.0·1014 cm−2. Raman spectra of the implanted films show that the implanted ions are predominantly incorporated at the sulfur sites and MoS2−2xSe2x alloys are formed, indicating high ion retention rates, in agreement with the predictions of molecular dynamics simulations of Se ion irradiation on MoS2 monolayers. We found that the ion retention rate is improved when implantation is performed at an elevated temperature of the target monolayers. Photoluminescence spectra reveal the presence of defects, which are mostly removed by post-implantation annealing at 200 °C, suggesting that, in addition to the Se atoms in the substitutional positions, weakly bound Se adatoms are the most common defects introduced by implantation at this ion energy.}, cin = {IAS-1 / PGI-1 / JARA-FIT / JARA-HPC / PGI-9}, ddc = {670}, cid = {I:(DE-Juel1)IAS-1-20090406 / I:(DE-Juel1)PGI-1-20110106 / $I:(DE-82)080009_20140620$ / $I:(DE-82)080012_20140620$ / I:(DE-Juel1)PGI-9-20110106}, pnm = {5211 - Topological Matter (POF4-521) / 5224 - Quantum Networking (POF4-522)}, pid = {G:(DE-HGF)POF4-5211 / G:(DE-HGF)POF4-5224}, typ = {PUB:(DE-HGF)16}, UT = {WOS:000814256800001}, doi = {10.1038/s41699-022-00318-4}, url = {https://juser.fz-juelich.de/record/910522}, }