000911035 001__ 911035
000911035 005__ 20221123131041.0
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000911035 0247_ $$2URN$$aurn:nbn:de:0001-2022112365
000911035 020__ $$a978-3-95806-656-4
000911035 037__ $$aFZJ-2022-04361
000911035 1001_ $$0P:(DE-Juel1)169713$$aBeale, Christopher$$b0$$eCorresponding author
000911035 245__ $$aSol-Gel-Synthese, Tintenstrahldruck und Blitzlampentemperung von Tantaloxid-Dünnschichten zur pH-Messung$$f- 2022-11-23
000911035 260__ $$aJülich$$bForschungszentrum Jülich GmbH Zentralbibliothek, Verlag$$c2022
000911035 300__ $$axlix, 339
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000911035 4900_ $$aSchriften des Forschungszentrums Jülich Reihe Information / Information$$v87
000911035 502__ $$aDissertation, RWTH Aachen University, 2022$$bDissertation$$cRWTH Aachen University$$d2022
000911035 520__ $$aThe measurement of pH and temperature plays an important role in many applications, including food analysis, environmental monitoring, chemical manufacturing, and medicine. Integration of pH and temperature sensors into packaging and electronic devices will continue to grow in importance as the world moves further towards Industry 4.0 and the Internet of Things, particularly as more industries become data-driven. New applications would also become possible by fabricating sensors on flexible substrates. Furthermore, building and operating a pH sensor without a reference electrode would provide many advantages, such as simpler manufacturing processes and long-term stability of the sensor. In a step towards achieving this goal, additive manufacturing of tantalum oxide films for pH sensing was explored in this work. Specifically, the sol-gelprocess and flash lamp annealing were used to deposit these films on gold metallized polyethylene terephthalate (PET) foils. After deposition of the sensing layers on the foil, both an extended-gate field-effect transistor (EGFET) and an impedimetric configuration were used to test the tantalum oxide layers for pH sensing. Additionally, a discovered negative temperature coefficient (NTC) in solgel derived ruthenium-tantalum oxide layers was examined for use as a temperature sensor, where the layers were thermally annealed with no photocuring on borosilicate wafer.In preparing the tantalum sol-gel solution for eventual layer deposition via photocuring, an optimized synthesis procedure for β-diketonate and β-ketoester complex formation with tantalum in 1,3-propanediol was conducted and the thin films characterized for photosensitivity in the near-UV range. Suboptimal synthesis procedures still work for device fabrication and were used in the production of the pH sensors. These solutions are stable in atmosphere, which is important for inkjet printing the solutions both in a laboratory and in an industrial environment. Inkjet printing of the solutions to form layers was then performed, followed by thermal annealing and flash lamp treatment of the layers. Photocured tantalum oxide layers derived from these solutions were characterized via various material characterization techniques. Exposure of the material to acidic and basic solutions in an EGFET configuration for pH sensing was also performed, and the layer was shown to withstand solutions in the range between pH 2 and pH 12. A photocured tantalum oxide layer was then tested for pH sensing in an impedimetric configuration on interdigitated electrodes (IDEs) without a reference  electrode. A pH dependent double layer capacitance was found in solutions of high ionic strength. The data was fitted with an equivalent circuit consisting of a double layer capacitance in parallel with an interfering ion specific adsorption capacitance.Finally, the NTC of sol-gel derived ruthenium-tantalum oxide layers was characterized. A first material was tested from 20°C to 100°C, and then down to cryogenic temperatures. This was followed by investigating a second material, with an improved preparation procedure from the first material, and tested from -20°C to 60°C. In both cases, a reproducible NTC was observed which could potentially be combined as a temperature sensor with the fabricated pH sensor in a single device
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