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@PHDTHESIS{Beale:911035,
      author       = {Beale, Christopher},
      title        = {{S}ol-{G}el-{S}ynthese, {T}intenstrahldruck und
                      {B}litzlampentemperung von {T}antaloxid-{D}ünnschichten zur
                      p{H}-{M}essung},
      volume       = {87},
      school       = {RWTH Aachen University},
      type         = {Dissertation},
      address      = {Jülich},
      publisher    = {Forschungszentrum Jülich GmbH Zentralbibliothek, Verlag},
      reportid     = {FZJ-2022-04361},
      isbn         = {978-3-95806-656-4},
      series       = {Schriften des Forschungszentrums Jülich Reihe Information
                      / Information},
      pages        = {xlix, 339},
      year         = {2022},
      note         = {Dissertation, RWTH Aachen University, 2022},
      abstract     = {The measurement of pH and temperature plays an important
                      role in many applications, including food analysis,
                      environmental monitoring, chemical manufacturing, and
                      medicine. Integration of pH and temperature sensors into
                      packaging and electronic devices will continue to grow in
                      importance as the world moves further towards Industry 4.0
                      and the Internet of Things, particularly as more industries
                      become data-driven. New applications would also become
                      possible by fabricating sensors on flexible substrates.
                      Furthermore, building and operating a pH sensor without a
                      reference electrode would provide many advantages, such as
                      simpler manufacturing processes and long-term stability of
                      the sensor. In a step towards achieving this goal, additive
                      manufacturing of tantalum oxide films for pH sensing was
                      explored in this work. Specifically, the sol-gelprocess and
                      flash lamp annealing were used to deposit these films on
                      gold metallized polyethylene terephthalate (PET) foils.
                      After deposition of the sensing layers on the foil, both an
                      extended-gate field-effect transistor (EGFET) and an
                      impedimetric configuration were used to test the tantalum
                      oxide layers for pH sensing. Additionally, a discovered
                      negative temperature coefficient (NTC) in solgel derived
                      ruthenium-tantalum oxide layers was examined for use as a
                      temperature sensor, where the layers were thermally annealed
                      with no photocuring on borosilicate wafer.In preparing the
                      tantalum sol-gel solution for eventual layer deposition via
                      photocuring, an optimized synthesis procedure for
                      β-diketonate and β-ketoester complex formation with
                      tantalum in 1,3-propanediol was conducted and the thin films
                      characterized for photosensitivity in the near-UV range.
                      Suboptimal synthesis procedures still work for device
                      fabrication and were used in the production of the pH
                      sensors. These solutions are stable in atmosphere, which is
                      important for inkjet printing the solutions both in a
                      laboratory and in an industrial environment. Inkjet printing
                      of the solutions to form layers was then performed, followed
                      by thermal annealing and flash lamp treatment of the layers.
                      Photocured tantalum oxide layers derived from these
                      solutions were characterized via various material
                      characterization techniques. Exposure of the material to
                      acidic and basic solutions in an EGFET configuration for pH
                      sensing was also performed, and the layer was shown to
                      withstand solutions in the range between pH 2 and pH 12. A
                      photocured tantalum oxide layer was then tested for pH
                      sensing in an impedimetric configuration on interdigitated
                      electrodes (IDEs) without a reference electrode. A pH
                      dependent double layer capacitance was found in solutions of
                      high ionic strength. The data was fitted with an equivalent
                      circuit consisting of a double layer capacitance in parallel
                      with an interfering ion specific adsorption
                      capacitance.Finally, the NTC of sol-gel derived
                      ruthenium-tantalum oxide layers was characterized. A first
                      material was tested from 20°C to 100°C, and then down to
                      cryogenic temperatures. This was followed by investigating a
                      second material, with an improved preparation procedure from
                      the first material, and tested from -20°C to 60°C. In both
                      cases, a reproducible NTC was observed which could
                      potentially be combined as a temperature sensor with the
                      fabricated pH sensor in a single device},
      cin          = {IBI-3},
      cid          = {I:(DE-Juel1)IBI-3-20200312},
      pnm          = {899 - ohne Topic (POF4-899)},
      pid          = {G:(DE-HGF)POF4-899},
      typ          = {PUB:(DE-HGF)3 / PUB:(DE-HGF)11},
      urn          = {urn:nbn:de:0001-2022112365},
      url          = {https://juser.fz-juelich.de/record/911035},
}