000911205 001__ 911205
000911205 005__ 20240712084532.0
000911205 0247_ $$2doi$$a10.1002/solr.202200651
000911205 0247_ $$2Handle$$a2128/32701
000911205 0247_ $$2WOS$$aWOS:000845082600001
000911205 037__ $$aFZJ-2022-04511
000911205 082__ $$a600
000911205 1001_ $$0P:(DE-Juel1)173822$$aQiu, Depeng$$b0
000911205 245__ $$aTransparent Conductive Oxide Sputtering Damage on Contact Passivation in Silicon Heterojunction Solar Cells with Hydrogenated Nanocrystalline Silicon
000911205 260__ $$aWeinheim$$bWiley-VCH$$c2022
000911205 3367_ $$2DRIVER$$aarticle
000911205 3367_ $$2DataCite$$aOutput Types/Journal article
000911205 3367_ $$0PUB:(DE-HGF)16$$2PUB:(DE-HGF)$$aJournal Article$$bjournal$$mjournal$$s1669107288_16660
000911205 3367_ $$2BibTeX$$aARTICLE
000911205 3367_ $$2ORCID$$aJOURNAL_ARTICLE
000911205 3367_ $$00$$2EndNote$$aJournal Article
000911205 520__ $$aMitigating the adverse effect of transparent conductive oxide (TCO) sputtering onthe passivation quality of the heterojunction contact is very critical for achievinghigh-efficiency silicon heterojunction (SHJ) solar cells. Herein, n-type ultra-thin(5 nm) nanocrystalline silicon (nc-Si:H) is utilized as a contact layer in rear-junctionSHJ solar cells. It is revealed that the TCO sputtering damage on the contact layer iscaused by the ion bombardment during the sputtering process and cannot be fullyrecovered by low-temperature annealing. A more severe passivation deteriorationis observed for the devices with nc-Si:H(n) having a higher microstructure factor.This result is explained by an increased ion penetration depth in the porous nc-Si:Hfilm. By applying denser nc-Si:H(n) in SHJ solar cells, the front silicon film stackshows more resilience to sputter damage, yielding a remarkable cell performanceon the M2-size wafer with certificated power conversion efficiency (η) of 23.87%.The sputter damage on nc-Si:H by TCO in SHJ solar cells is explored in depth forthe first time from the perspective of silicon thin films.
000911205 536__ $$0G:(DE-HGF)POF4-1213$$a1213 - Cell Design and Development (POF4-121)$$cPOF4-121$$fPOF IV$$x0
000911205 536__ $$0G:(BMWi)0324275E$$aVerbundvorhaben: Street - Einsatz von hocheffizienten Solarzellen in elektrisch betriebenen Nutzfahrzeugen; Teilvorhaben: Herstellung und Entwicklung von (0324275E)$$c0324275E$$x1
000911205 536__ $$0G:(BMWi)0324198D$$aVerbundvorhaben: TuKaN - Tunnelkontakte auf N-Typ: für die Metallisierung mit Siebdruck, Teilvorhaben: Herstellung von Solarzellen mit passivierendem Tunnelkontakt und funktionalen Schichten aus katalytischer und plasmaunterstützter chemischer Gasphasenab (0324198D)$$c0324198D$$x2
000911205 536__ $$0G:(BMWi)0324351$$aTouch - Technologie- und Charakterisierungsplattform für die Entwicklung von hoch-effizienten Silizium-Heterostruktursolarzellen (0324351)$$c0324351$$x3
000911205 588__ $$aDataset connected to CrossRef, Journals: juser.fz-juelich.de
000911205 7001_ $$0P:(DE-Juel1)169946$$aDuan, Weiyuan$$b1$$eCorresponding author
000911205 7001_ $$0P:(DE-Juel1)130263$$aLambertz, Andreas$$b2
000911205 7001_ $$0P:(DE-Juel1)178007$$aEberst, Alexander$$b3
000911205 7001_ $$0P:(DE-Juel1)130219$$aBittkau, Karsten$$b4
000911205 7001_ $$0P:(DE-Juel1)143905$$aRau, Uwe$$b5$$ufzj
000911205 7001_ $$0P:(DE-Juel1)130233$$aDing, Kaining$$b6
000911205 773__ $$0PERI:(DE-600)2882014-9$$a10.1002/solr.202200651$$gVol. 6, no. 10, p. 2200651 -$$n10$$p2200651$$tSolar RRL$$v6$$x2367-198X$$y2022
000911205 8564_ $$uhttps://juser.fz-juelich.de/record/911205/files/Solar%20RRL%20-%202022%20-%20Qiu%20-%20Transparent%20Conductive%20Oxide%20Sputtering%20Damage%20on%20Contact%20Passivation%20in%20Silicon%20Heterojunction.pdf$$yOpenAccess
000911205 8767_ $$d2022-02-15$$eHybrid-OA$$jDEAL
000911205 909CO $$ooai:juser.fz-juelich.de:911205$$pdnbdelivery$$popenCost$$pVDB$$pdriver$$pOpenAPC_DEAL$$popen_access$$popenaire
000911205 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)173822$$aForschungszentrum Jülich$$b0$$kFZJ
000911205 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)169946$$aForschungszentrum Jülich$$b1$$kFZJ
000911205 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130263$$aForschungszentrum Jülich$$b2$$kFZJ
000911205 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)178007$$aForschungszentrum Jülich$$b3$$kFZJ
000911205 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130219$$aForschungszentrum Jülich$$b4$$kFZJ
000911205 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)143905$$aForschungszentrum Jülich$$b5$$kFZJ
000911205 9101_ $$0I:(DE-588b)5008462-8$$6P:(DE-Juel1)130233$$aForschungszentrum Jülich$$b6$$kFZJ
000911205 9131_ $$0G:(DE-HGF)POF4-121$$1G:(DE-HGF)POF4-120$$2G:(DE-HGF)POF4-100$$3G:(DE-HGF)POF4$$4G:(DE-HGF)POF$$9G:(DE-HGF)POF4-1213$$aDE-HGF$$bForschungsbereich Energie$$lMaterialien und Technologien für die Energiewende (MTET)$$vPhotovoltaik und Windenergie$$x0
000911205 9141_ $$y2022
000911205 915__ $$0LIC:(DE-HGF)CCBYNCND4$$2HGFVOC$$aCreative Commons Attribution-NonCommercial-NoDerivs CC BY-NC-ND 4.0
000911205 915__ $$0StatID:(DE-HGF)3001$$2StatID$$aDEAL Wiley$$d2021-01-29$$wger
000911205 915__ $$0StatID:(DE-HGF)0113$$2StatID$$aWoS$$bScience Citation Index Expanded$$d2021-01-29
000911205 915__ $$0StatID:(DE-HGF)0510$$2StatID$$aOpenAccess
000911205 915__ $$0StatID:(DE-HGF)0160$$2StatID$$aDBCoverage$$bEssential Science Indicators$$d2021-01-29
000911205 915__ $$0StatID:(DE-HGF)0100$$2StatID$$aJCR$$bSOL RRL : 2021$$d2022-11-16
000911205 915__ $$0StatID:(DE-HGF)0200$$2StatID$$aDBCoverage$$bSCOPUS$$d2022-11-16
000911205 915__ $$0StatID:(DE-HGF)0300$$2StatID$$aDBCoverage$$bMedline$$d2022-11-16
000911205 915__ $$0StatID:(DE-HGF)0199$$2StatID$$aDBCoverage$$bClarivate Analytics Master Journal List$$d2022-11-16
000911205 915__ $$0StatID:(DE-HGF)1160$$2StatID$$aDBCoverage$$bCurrent Contents - Engineering, Computing and Technology$$d2022-11-16
000911205 915__ $$0StatID:(DE-HGF)0150$$2StatID$$aDBCoverage$$bWeb of Science Core Collection$$d2022-11-16
000911205 915__ $$0StatID:(DE-HGF)1150$$2StatID$$aDBCoverage$$bCurrent Contents - Physical, Chemical and Earth Sciences$$d2022-11-16
000911205 915__ $$0StatID:(DE-HGF)9905$$2StatID$$aIF >= 5$$bSOL RRL : 2021$$d2022-11-16
000911205 915pc $$0PC:(DE-HGF)0000$$2APC$$aAPC keys set
000911205 915pc $$0PC:(DE-HGF)0001$$2APC$$aLocal Funding
000911205 915pc $$0PC:(DE-HGF)0002$$2APC$$aDFG OA Publikationskosten
000911205 915pc $$0PC:(DE-HGF)0120$$2APC$$aDEAL: Wiley 2019
000911205 920__ $$lyes
000911205 9201_ $$0I:(DE-Juel1)IEK-5-20101013$$kIEK-5$$lPhotovoltaik$$x0
000911205 9801_ $$aFullTexts
000911205 980__ $$ajournal
000911205 980__ $$aVDB
000911205 980__ $$aUNRESTRICTED
000911205 980__ $$aI:(DE-Juel1)IEK-5-20101013
000911205 980__ $$aAPC
000911205 981__ $$aI:(DE-Juel1)IMD-3-20101013