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024 7 _ |a 10.1002/solr.202200651
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037 _ _ |a FZJ-2022-04511
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100 1 _ |a Qiu, Depeng
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245 _ _ |a Transparent Conductive Oxide Sputtering Damage on Contact Passivation in Silicon Heterojunction Solar Cells with Hydrogenated Nanocrystalline Silicon
260 _ _ |a Weinheim
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520 _ _ |a Mitigating the adverse effect of transparent conductive oxide (TCO) sputtering onthe passivation quality of the heterojunction contact is very critical for achievinghigh-efficiency silicon heterojunction (SHJ) solar cells. Herein, n-type ultra-thin(5 nm) nanocrystalline silicon (nc-Si:H) is utilized as a contact layer in rear-junctionSHJ solar cells. It is revealed that the TCO sputtering damage on the contact layer iscaused by the ion bombardment during the sputtering process and cannot be fullyrecovered by low-temperature annealing. A more severe passivation deteriorationis observed for the devices with nc-Si:H(n) having a higher microstructure factor.This result is explained by an increased ion penetration depth in the porous nc-Si:Hfilm. By applying denser nc-Si:H(n) in SHJ solar cells, the front silicon film stackshows more resilience to sputter damage, yielding a remarkable cell performanceon the M2-size wafer with certificated power conversion efficiency (η) of 23.87%.The sputter damage on nc-Si:H by TCO in SHJ solar cells is explored in depth forthe first time from the perspective of silicon thin films.
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536 _ _ |a Verbundvorhaben: Street - Einsatz von hocheffizienten Solarzellen in elektrisch betriebenen Nutzfahrzeugen; Teilvorhaben: Herstellung und Entwicklung von (0324275E)
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536 _ _ |a Verbundvorhaben: TuKaN - Tunnelkontakte auf N-Typ: für die Metallisierung mit Siebdruck, Teilvorhaben: Herstellung von Solarzellen mit passivierendem Tunnelkontakt und funktionalen Schichten aus katalytischer und plasmaunterstützter chemischer Gasphasenab (0324198D)
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536 _ _ |a Touch - Technologie- und Charakterisierungsplattform für die Entwicklung von hoch-effizienten Silizium-Heterostruktursolarzellen (0324351)
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700 1 _ |a Duan, Weiyuan
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700 1 _ |a Lambertz, Andreas
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700 1 _ |a Eberst, Alexander
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700 1 _ |a Bittkau, Karsten
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700 1 _ |a Rau, Uwe
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700 1 _ |a Ding, Kaining
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773 _ _ |a 10.1002/solr.202200651
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