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@INPROCEEDINGS{Park:911525,
      author       = {Park, Junbeom and Jo, Janghyun and Xu, Qi and Camara,
                      Osmane and Tempel, Hermann and Kungl, Hans and Basak,
                      Shibabrata and Bauer, Alexander and Eichel, Rüdiger-A.},
      title        = {{FIB}-based lamella preparation on {MEMS} chip for in-situ
                      {TEM}},
      reportid     = {FZJ-2022-04785},
      year         = {2022},
      abstract     = {The in-situ transmission electron microscope (in-situ TEM)
                      method enables observing the morphological, structural, and
                      chemical transition of the sample with stimuli such as
                      heating or biasing via up to atomic resolution. For a
                      successful in-situ TEM experiment, the sample should be
                      prepared to fit the experimental requirements to stimulate
                      correctly. In the sintering process, heating and gas
                      environments are required as stimuli. Compared to heating,
                      the gas environment is a challenging stimulus because the
                      inside of TEM is ultra-high vacuum $(10^-4$ ~ $10^-9$ Pa)
                      condition. Environmental TEM (ETEM) can form the gas
                      environment up to 10 Pa, but many sintering processes are
                      conducted at atmospheric pressure $(10^6$ Pa). Therefore, a
                      nano-sized closed chamber is mandatory to replicate the real
                      sintering process in TEM. Electron transmittable thin SiN
                      film-coated micro-electromechanical system (MEMS) chips
                      enable the formation of atmospheric conditions in the TEM.
                      If the sample is a nanoparticle, drop-casting on a MEMS chip
                      is the simplest way to prepare. However, nanoparticle shape
                      is not available to investigate the phenomena such as
                      interaction on composite materials. The focused ion-beam
                      (FIB) method is a useful preparation method for the TEM
                      sample (lamella) from the bulk to analyze the sample beyond
                      nanoparticles. The FIB-based preparation for the in-situ TEM
                      method contains two processes; lamella preparation and
                      lamella attachment on MEMS chip. Lamella preparation for
                      MEMS chip is almost similar to regular TEM analysis, except
                      if the stimulus is biasing. In the case of biasing
                      experiment, the lamella should be prepared without the Pt
                      layer, which is typically used as a protective layer during
                      the FIB process. To obtain the lamella properly without Pt
                      protection layer, the ion beam should be adjusted to lower
                      electron voltage and lower current conditions.Lamella
                      attachment on the MEMS chip is the most challenging point.
                      Electron beam imaging and ion beam imaging are generally
                      used to recognize 3-dimensional movement during the
                      attachment. In MEMS chips case, especially for gas
                      experiments, ion beam imaging can break the thin SiN film.
                      To avoid breaking the SiN film, lamella should be controlled
                      mostly on electron beam and carefully checked with minimum
                      ion beam dose as much as possible. We will introduce the
                      FIB-based sample preparation and in-situ TEM gas experiment
                      result to investigate the solid-state electrolyte sintering
                      process.},
      month         = {Sep},
      date          = {2022-09-04},
      organization  = {16th Multinational Congress on
                       Microscopy, Brno (Czech Republic), 4
                       Sep 2022 - 9 Sep 2022},
      subtyp        = {After Call},
      cin          = {IEK-9 / ER-C-1},
      cid          = {I:(DE-Juel1)IEK-9-20110218 / I:(DE-Juel1)ER-C-1-20170209},
      pnm          = {1232 - Power-based Fuels and Chemicals (POF4-123) / iNEW2.0
                      (BMBF-03SF0627A) / Electroscopy - Electrochemistry of
                      All-solid-state-battery Processes using Operando Electron
                      Microscopy (892916) / HITEC - Helmholtz Interdisciplinary
                      Doctoral Training in Energy and Climate Research (HITEC)
                      (HITEC-20170406)},
      pid          = {G:(DE-HGF)POF4-1232 / G:(DE-Juel1)BMBF-03SF0627A /
                      G:(EU-Grant)892916 / G:(DE-Juel1)HITEC-20170406},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/911525},
}