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@ARTICLE{Menke:9158,
author = {Menke, T. and Dittmann, R. and Meuffels, P. and Szot, K.
and Waser, R.},
title = {{I}mpact of the electroforming process on the device
stability of epitaxial {F}e-doped {S}r{T}i{O}3 resistive
switching cells},
journal = {Journal of applied physics},
volume = {106},
issn = {0021-8979},
address = {Melville, NY},
publisher = {American Institute of Physics},
reportid = {PreJuSER-9158},
pages = {114507},
year = {2009},
note = {We thank R. M,nstermann, M. Waters, K. Shibuya, and R.
Bruchhaus for helpful discussion and the critical reading of
the manuscript. This work was financially supported by Intel
Corp., Santa Clara.},
abstract = {In this work, the results of our detailed investigations on
the electroforming procedure in
Pt/SrTi0.99Fe0.01O3/SrTi0.99Nb0.01O3 [Pt/STO(Fe)/Nb:STO]
metal-insulator-metal (MIM)-devices and its impact on the
performance of resistive switching memory devices are
presented. Questions about the exact location of the
modifications triggered by the electroforming procedure
within the investigated MIM-devices will be addressed. From
a technological point of view, the thermal stability of
formed devices becomes important. An increase in the device
resistances during retention measurements has been observed
indicating the presence of internal redistribution effects.
These may result from an oxygen vacancy gradient induced by
the forming process. However, these internal relaxation
effects will not end up in the unformed state. Annealing
experiments under defined atmospheric conditions allowed
distinguishing between internal and external rediffusion
effects. We found that SrTiO3 starts to interact with the
surrounding atmosphere at moderate temperatures. The
occurring external reoxidation effect set the device back to
its initial (unformed) state. As a result, the investigated
MIM-structures can no longer be regarded as closed systems
and presented the large implication on the retention of such
devices. The experimental findings are supported by
calculations of the penetration depth of oxygen
ions/vacancies in SrTiO3.},
keywords = {J (WoSType)},
cin = {IFF-6 / JARA-FIT},
ddc = {530},
cid = {I:(DE-Juel1)VDB786 / $I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
shelfmark = {Physics, Applied},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000272838600143},
doi = {10.1063/1.3267485},
url = {https://juser.fz-juelich.de/record/9158},
}