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@ARTICLE{Bertoni:916761,
author = {Bertoni, Giovanni and Rotunno, Enzo and Marsmans, Daan and
Tiemeijer, Peter and Tavabi, Amir H. and Dunin-Borkowski,
Rafal E. and Grillo, Vincenzo},
title = {{N}ear-real-time diagnosis of electron optical phase
aberrations in scanning transmission electron microscopy
using an artificial neural network},
journal = {Ultramicroscopy},
volume = {245},
issn = {0304-3991},
address = {Amsterdam},
publisher = {Elsevier Science},
reportid = {FZJ-2023-00085},
pages = {113663 -},
year = {2023},
abstract = {The key to optimizing spatial resolution in a
state-of-the-art scanning transmission electron microscope
is the ability to measure and correct for electron optical
aberrations of the probe-forming lenses precisely. Several
diagnostic methods for aberration measurement and correction
have been proposed, albeit often at the cost of relatively
long acquisition times. Here, we illustrate how artificial
intelligence can be used to provide near-real-time diagnosis
of aberrations from individual Ronchigrams. The demonstrated
speed of aberration measurement is important because
microscope conditions can change rapidly. It is also
important for the operation of MEMS-based hardware
correction elements, which have less intrinsic stability
than conventional electromagnetic lenses.},
cin = {ER-C-1},
ddc = {570},
cid = {I:(DE-Juel1)ER-C-1-20170209},
pnm = {5351 - Platform for Correlative, In Situ and Operando
Characterization (POF4-535) / ESTEEM3 - Enabling Science and
Technology through European Electron Microscopy (823717)},
pid = {G:(DE-HGF)POF4-5351 / G:(EU-Grant)823717},
typ = {PUB:(DE-HGF)16},
pubmed = {36566529},
UT = {WOS:000912355300001},
doi = {10.1016/j.ultramic.2022.113663},
url = {https://juser.fz-juelich.de/record/916761},
}