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@INPROCEEDINGS{Ptter:916962,
      author       = {Pütter, Sabine},
      title        = {{T}hin film fabrication for users: {P}ossibilities and
                      perspectives},
      reportid     = {FZJ-2023-00228},
      year         = {2021},
      abstract     = {The Jülich Center for Neutron Science develops and uses
                      scattering methods for research into structural and magnetic
                      order of functional materials. For users, access to neutron
                      measurements is provided at the Heinz Mayer-Leibnitz Zentrum
                      in Garching, Germany. On top, a special service is offered
                      for several years, i.e. the users may also apply for thin
                      film sample fabrication utilizing Molecular Beam Epitaxy
                      (MBE).The JCNS thin film laboratory runs an oxide MBE system
                      for the growth of various types of samples, for example
                      “classical” magnetic thin films, transition metal oxide
                      heterostructures or thin metal films for soft matter
                      studies, acting as defined surfaces. In this presentation,
                      we will give an overview for high quality thin film samples
                      all fabricated in the JCNS thin film laboratory, like
                      SrCoOx, Fe4N or [Pt/Co/Ta] multilayers and their magnetic
                      properties. The focus lies on stoichiometry, morphology and
                      thickness precision and detailed information about the
                      possibilities and constraints in sample fabrication for
                      users will be given.The MBE setup is equipped with effusion
                      cells, electron guns for electron beam evaporation and a
                      plasma source for use with oxygen or nitrogen. A large
                      variety of deposition materials are offered. Compounds may
                      be produced either by codeposition or by shutter modulated
                      growth of individual layers. For in-situ surface structure
                      analysis reflection high and low energy electron diffraction
                      is utilized while Auger electron spectroscopy is applied for
                      in-situ chemical surface analysis.For quasi in-situ neutron
                      reflectometry of thin films, which are sensitive to ambient
                      air, a small versatile transfer chamber is may be used for
                      sample transfer from the MBE laboratory to the neutron
                      reflectometer MARIA and measurement under UHV conditions.
                      Recently the MBE setup has been moved into a larger
                      laboratory and a new feature, i.e. the determination of the
                      in situ flux rate of atoms using the principle of atomic
                      absorption spectroscopy is about to be established. This
                      method will enhance the precision in stoichiometry
                      drastically.You may apply for neutron experiments and thin
                      film sample fabrication at mlz-garching.de For financial
                      support see NFFA (Nanoscience Foundries and Fine Analysis)
                      Europe (NFFA.eu).},
      month         = {Nov},
      date          = {2021-11-25},
      organization  = {Symposium on Spintronics and Magnetism
                       2021, Online (India), 25 Nov 2021 - 27
                       Nov 2021},
      subtyp        = {Invited},
      cin          = {JCNS-2 / JCNS-4 / JCNS-FRM-II / MLZ},
      cid          = {I:(DE-Juel1)JCNS-2-20110106 / I:(DE-Juel1)JCNS-4-20201012 /
                      I:(DE-Juel1)JCNS-FRM-II-20110218 / I:(DE-588b)4597118-3},
      pnm          = {632 - Materials – Quantum, Complex and Functional
                      Materials (POF4-632) / 6G4 - Jülich Centre for Neutron
                      Research (JCNS) (FZJ) (POF4-6G4)},
      pid          = {G:(DE-HGF)POF4-632 / G:(DE-HGF)POF4-6G4},
      experiment   = {EXP:(DE-MLZ)MBE-MLZ-20151210 / EXP:(DE-MLZ)MARIA-20140101},
      typ          = {PUB:(DE-HGF)6},
      url          = {https://juser.fz-juelich.de/record/916962},
}