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@INPROCEEDINGS{Ptter:916965,
author = {Pütter, Sabine},
title = {{T}hin film growth by {M}olecular {B}eam {E}pitaxy for{MLZ}
users},
reportid = {FZJ-2023-00231},
year = {2020},
abstract = {Molecular Beam Epitaxy (MBE) is a versatile tool to
fabricate high quality and high purity epitaxial thin films.
At MLZ, the Jülich Centre for Neutron Science (JCNS) runs
an MBE system to provide samples for users who either do not
have the expertise to prepare thin film samples for their
neutron experiments and/or the equipment.In other words: If
you need thin film samples for your neutron experiments,
let’s discuss how we can prepare your samples!The MBE
system is equipped with effusion cells, electron guns for
electron beam evaporation and a plasma source for use with
oxygen or nitrogen. A large variety of deposition materials
can be used. Compounds are produced either by codeposition
or by shutter modulated growth of individual layers. For
in-situ surface struc- ture analysis reflection high and low
energy electron diffraction is utilized while Auger electron
spectroscopy is applied for in-situ chemical surface
analysis.Thin film samples which are sensitive to ambient
conditions are first fabricated in the MBE system and then
measured at the neutron reflectometer MARIA of JCNS
utilizing a versatile small ultra high vacuum condition
chamber.[1]In our presentation we will present examples for
high quality thin films like e.g. FeN, Fe4N, SrCoO3 or
Nb/Al2O3( 1-1 0 2) and link them to neutron experiments.[1]
A. Syed Mohd, S. Pütter, S. Mattauch, A. Koutsioubas, H.
Schneider, A. Weber, and T. Brückel, Rev. Sci. Instrum.,
vol. 87, pp. 123909, 2016},
month = {Dec},
date = {2020-12-08},
organization = {MLZ User Meeting $\&$ German Neutron
Scattering Conference 2020, Online
(Germany), 8 Dec 2020 - 10 Dec 2020},
subtyp = {After Call},
cin = {JCNS-2 / JCNS-4 / JCNS-FRM-II / MLZ},
cid = {I:(DE-Juel1)JCNS-2-20110106 / I:(DE-Juel1)JCNS-4-20201012 /
I:(DE-Juel1)JCNS-FRM-II-20110218 / I:(DE-588b)4597118-3},
pnm = {632 - Materials – Quantum, Complex and Functional
Materials (POF4-632) / 6G4 - Jülich Centre for Neutron
Research (JCNS) (FZJ) (POF4-6G4)},
pid = {G:(DE-HGF)POF4-632 / G:(DE-HGF)POF4-6G4},
experiment = {EXP:(DE-MLZ)MBE-MLZ-20151210 / EXP:(DE-MLZ)MARIA-20140101},
typ = {PUB:(DE-HGF)24},
url = {https://juser.fz-juelich.de/record/916965},
}