%0 Conference Paper
%A Schmidt, Niclas
%A Karthäuser, Silvia
%A Kaiser, N.
%A Vogel, T.
%A Piros, E.
%A Alff, L.
%A Waser, R.
%A Dittmann, Regina
%T Spatially resolved electrical analysis of epitaxial defect-stabilized hafnium oxide thin films
%M FZJ-2023-00708
%D 2022
%B Materials Research Society Fall Meeting
%C 27 Nov 2022 - 2 Dec 2022, Boston (USA)
Y2 27 Nov 2022 - 2 Dec 2022
M2 Boston, USA
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/917495