TY  - CONF
AU  - Schmidt, Niclas
AU  - Karthäuser, Silvia
AU  - Kaiser, N.
AU  - Vogel, T.
AU  - Piros, E.
AU  - Alff, L.
AU  - Waser, R.
AU  - Dittmann, Regina
TI  - Spatially resolved electrical analysis of epitaxial defect-stabilized hafnium oxide thin films
M1  - FZJ-2023-00708
PY  - 2022
T2  - Materials Research Society Fall Meeting
CY  - 27 Nov 2022 - 2 Dec 2022, Boston (USA)
Y2  - 27 Nov 2022 - 2 Dec 2022
M2  - Boston, USA
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/917495
ER  -