%0 Journal Article
%A Du, Hongchu
%T DMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images
%J Nanomanufacturing and metrology
%V 5
%N 2
%@ 2520-811X
%C [Singapore]
%I Springer Singapore
%M FZJ-2023-00741
%P 101 - 111
%D 2022
%X Despite the wide availability and usage of Gatan’s DigitalMicrograph software in the electron microscopy community for image recording and analysis, nonlinear least-squares fitting in DigitalMicrograph is less straightforward. This work presents a ready-to-use tool, the DMPFIT software package, written in DigitalMicrograph script and C++ language, for nonlinear least-squares fitting of the intensity distribution of atomic columns in atomic-resolution transmission electron microscopy (TEM) images with a general two-dimensional (2D) Gaussian model. Applications of the DMPFIT software are demonstrated both in atomic-resolution conventional coherent TEM (CTEM) images recorded by the negative spherical aberration imaging technique and in high angle annular dark field (HAADF) scanning TEM (STEM) images. The implemented peak-finding algorithm based on the periodicity of 2D lattices enables reliable and convenient atomic-scale metrology as well as  intuitive presentation of the resolved atomic structures.
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001359358600012
%R 10.1007/s41871-022-00137-7
%U https://juser.fz-juelich.de/record/917538