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000917538 041__ $$aEnglish
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000917538 1001_ $$0P:(DE-Juel1)145710$$aDu, Hongchu$$b0$$eCorresponding author
000917538 245__ $$aDMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images
000917538 260__ $$a[Singapore]$$bSpringer Singapore$$c2022
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000917538 520__ $$aDespite the wide availability and usage of Gatan’s DigitalMicrograph software in the electron microscopy community for image recording and analysis, nonlinear least-squares fitting in DigitalMicrograph is less straightforward. This work presents a ready-to-use tool, the DMPFIT software package, written in DigitalMicrograph script and C++ language, for nonlinear least-squares fitting of the intensity distribution of atomic columns in atomic-resolution transmission electron microscopy (TEM) images with a general two-dimensional (2D) Gaussian model. Applications of the DMPFIT software are demonstrated both in atomic-resolution conventional coherent TEM (CTEM) images recorded by the negative spherical aberration imaging technique and in high angle annular dark field (HAADF) scanning TEM (STEM) images. The implemented peak-finding algorithm based on the periodicity of 2D lattices enables reliable and convenient atomic-scale metrology as well as  intuitive presentation of the resolved atomic structures.
000917538 536__ $$0G:(DE-HGF)POF4-5353$$a5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535)$$cPOF4-535$$fPOF IV$$x0
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000917538 773__ $$0PERI:(DE-600)2918284-0$$a10.1007/s41871-022-00137-7$$gVol. 5, no. 2, p. 101 - 111$$n2$$p101 - 111$$tNanomanufacturing and metrology$$v5$$x2520-811X$$y2022
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000917538 9141_ $$y2022
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