TY  - JOUR
AU  - Du, Hongchu
TI  - DMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images
JO  - Nanomanufacturing and metrology
VL  - 5
IS  - 2
SN  - 2520-811X
CY  - [Singapore]
PB  - Springer Singapore
M1  - FZJ-2023-00741
SP  - 101 - 111
PY  - 2022
AB  - Despite the wide availability and usage of Gatan’s DigitalMicrograph software in the electron microscopy community for image recording and analysis, nonlinear least-squares fitting in DigitalMicrograph is less straightforward. This work presents a ready-to-use tool, the DMPFIT software package, written in DigitalMicrograph script and C++ language, for nonlinear least-squares fitting of the intensity distribution of atomic columns in atomic-resolution transmission electron microscopy (TEM) images with a general two-dimensional (2D) Gaussian model. Applications of the DMPFIT software are demonstrated both in atomic-resolution conventional coherent TEM (CTEM) images recorded by the negative spherical aberration imaging technique and in high angle annular dark field (HAADF) scanning TEM (STEM) images. The implemented peak-finding algorithm based on the periodicity of 2D lattices enables reliable and convenient atomic-scale metrology as well as  intuitive presentation of the resolved atomic structures.
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001359358600012
DO  - DOI:10.1007/s41871-022-00137-7
UR  - https://juser.fz-juelich.de/record/917538
ER  -