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@ARTICLE{Du:917538,
author = {Du, Hongchu},
title = {{DMPFIT}: {A} {T}ool for {A}tomic-{S}cale {M}etrology via
{N}onlinear {L}east-{S}quares {F}itting of {P}eaks in
{A}tomic-{R}esolution {TEM} {I}mages},
journal = {Nanomanufacturing and metrology},
volume = {5},
number = {2},
issn = {2520-811X},
address = {[Singapore]},
publisher = {Springer Singapore},
reportid = {FZJ-2023-00741},
pages = {101 - 111},
year = {2022},
abstract = {Despite the wide availability and usage of Gatan’s
DigitalMicrograph software in the electron microscopy
community for image recording and analysis, nonlinear
least-squares fitting in DigitalMicrograph is less
straightforward. This work presents a ready-to-use tool, the
DMPFIT software package, written in DigitalMicrograph script
and C++ language, for nonlinear least-squares fitting of the
intensity distribution of atomic columns in
atomic-resolution transmission electron microscopy (TEM)
images with a general two-dimensional (2D) Gaussian model.
Applications of the DMPFIT software are demonstrated both in
atomic-resolution conventional coherent TEM (CTEM) images
recorded by the negative spherical aberration imaging
technique and in high angle annular dark field (HAADF)
scanning TEM (STEM) images. The implemented peak-finding
algorithm based on the periodicity of 2D lattices enables
reliable and convenient atomic-scale metrology as well as
intuitive presentation of the resolved atomic structures.},
cin = {ER-C-2},
ddc = {620},
cid = {I:(DE-Juel1)ER-C-2-20170209},
pnm = {5353 - Understanding the Structural and Functional Behavior
of Solid State Systems (POF4-535)},
pid = {G:(DE-HGF)POF4-5353},
typ = {PUB:(DE-HGF)16},
UT = {WOS:001359358600012},
doi = {10.1007/s41871-022-00137-7},
url = {https://juser.fz-juelich.de/record/917538},
}