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024 7 _ |a 10.1007/s41871-022-00137-7
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024 7 _ |a 2520-8128
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024 7 _ |a 2128/33712
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037 _ _ |a FZJ-2023-00741
041 _ _ |a English
082 _ _ |a 620
100 1 _ |a Du, Hongchu
|0 P:(DE-Juel1)145710
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245 _ _ |a DMPFIT: A Tool for Atomic-Scale Metrology via Nonlinear Least-Squares Fitting of Peaks in Atomic-Resolution TEM Images
260 _ _ |a [Singapore]
|c 2022
|b Springer Singapore
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336 7 _ |a Journal Article
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520 _ _ |a Despite the wide availability and usage of Gatan’s DigitalMicrograph software in the electron microscopy community for image recording and analysis, nonlinear least-squares fitting in DigitalMicrograph is less straightforward. This work presents a ready-to-use tool, the DMPFIT software package, written in DigitalMicrograph script and C++ language, for nonlinear least-squares fitting of the intensity distribution of atomic columns in atomic-resolution transmission electron microscopy (TEM) images with a general two-dimensional (2D) Gaussian model. Applications of the DMPFIT software are demonstrated both in atomic-resolution conventional coherent TEM (CTEM) images recorded by the negative spherical aberration imaging technique and in high angle annular dark field (HAADF) scanning TEM (STEM) images. The implemented peak-finding algorithm based on the periodicity of 2D lattices enables reliable and convenient atomic-scale metrology as well as intuitive presentation of the resolved atomic structures.
536 _ _ |a 5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535)
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773 _ _ |a 10.1007/s41871-022-00137-7
|g Vol. 5, no. 2, p. 101 - 111
|0 PERI:(DE-600)2918284-0
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|p 101 - 111
|t Nanomanufacturing and metrology
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|y 2022
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856 4 _ |u https://juser.fz-juelich.de/record/917538/files/s41871-022-00137-7.pdf
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914 1 _ |y 2022
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