%0 Conference Paper
%A Lopes, J. M. J.
%A Durgun Özben, E.
%A Nichau, A.
%A Luptak, R.
%A Schubert, J.
%A Mantl, S.
%T Amorphous ternary high-k oxides on Si and higher mobility substrates
%M PreJuSER-9224
%D 2010
%Z Record converted from VDB: 12.11.2012
%< DPG-Frühjahrstagung
Y2 23 Mar 2010
M2 Regensburg, 
%F PUB:(DE-HGF)6
%9 Conference Presentation
%U https://juser.fz-juelich.de/record/9224