TY  - CONF
AU  - Lopes, J. M. J.
AU  - Durgun Özben, E.
AU  - Nichau, A.
AU  - Luptak, R.
AU  - Schubert, J.
AU  - Mantl, S.
TI  - Amorphous ternary high-k oxides on Si and higher mobility substrates
M1  - PreJuSER-9224
PY  - 2010
N1  - Record converted from VDB: 12.11.2012
Y2  - 23 Mar 2010
M2  - Regensburg, 
LB  - PUB:(DE-HGF)6
UR  - https://juser.fz-juelich.de/record/9224
ER  -