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@INPROCEEDINGS{Lopes:9224,
author = {Lopes, J. M. J. and Durgun Özben, E. and Nichau, A. and
Luptak, R. and Schubert, J. and Mantl, S.},
title = {{A}morphous ternary high-k oxides on {S}i and higher
mobility substrates},
reportid = {PreJuSER-9224},
year = {2010},
note = {Record converted from VDB: 12.11.2012},
comment = {DPG-Frühjahrstagung},
booktitle = {DPG-Frühjahrstagung},
month = {Mar},
date = {2010-03-23},
organization = {Regensburg, 23 Mar 2010},
subtyp = {Invited},
cin = {IBN-1 / JARA-FIT},
cid = {I:(DE-Juel1)VDB799 / $I:(DE-82)080009_20140620$},
pnm = {Grundlagen für zukünftige Informationstechnologien},
pid = {G:(DE-Juel1)FUEK412},
typ = {PUB:(DE-HGF)6},
url = {https://juser.fz-juelich.de/record/9224},
}