% IMPORTANT: The following is UTF-8 encoded. This means that in the presence % of non-ASCII characters, it will not work with BibTeX 0.99 or older. % Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or % “biber”. @INPROCEEDINGS{Mikulics:943412, author = {Mikulics, Martin and Kordos, Peter and Gregusova, D. and Winden, A. and Sofer, Z. and Mayer, Joachim and Hardtdegen, Hilde}, title = {{T}uning {III}-nitride nano-{LED}s via laser-micro-annealing}, reportid = {FZJ-2023-00998}, year = {2022}, abstract = {Conventional reactive ion etching (RIE) used for the space definition/formation of nano-LEDs leads to a significant decrease in their electroluminescence. Among all the technological approaches to boost the efficiency of micrometer and nano- sized LED structures, the precise local laser micro annealing (LMA) procedure exhibits still undiscovered potential. The main goal behind the application of the “LMA” procedure is to “adjust” and/or to “engineer” the emission intensity of nano-LEDs according to requirements for example in transmistor based optical computing architectures currently under development. Here in this work, we present correlative ̶ optical (micro electro- $\&$ photoluminescence, Raman spectroscopy) and electrical ̶ characterization of single nano-LEDs in arrays integrated into a vertical device layout. Scanning electron microscopy investigations (figure 1) reveal inhomogeneous surface nano-LED morphology. Micro photoluminescence studies indicate that the LMA process has a direct impact on the curing of etching related defects. These are responsible for the suppression of radiative recombination in the nano-LED devices. Figure 2 presents a micro electroluminescence mapping after the successful “conditioning” procedure performed on nano-LEDs in an array with different annealing conditions. Furthermore, micro-Raman thermography investigations performed on single nano-LED structures (after LMA) disclose an up to 60K decrease in work temperature. Additionally, long-term operation electroluminescence measurements (up to 5000 hours) indicate that the LMA approach affects the nano-LEDs performance as well as device lifetime and reliability advantageously. The results presented demonstrate the suitability and reliability of the vertically integrated nano-LEDs conditioned locally/selectively by LMA as a key component for future on chip integrated electro-optic convertors. They could play an important role in the development of novel optical computing architectures based on transmistor/all optical switch units. Figure 1: Scanning electron micrograph of a single nano-LED structure with its nickel cap (serving as the etching mask) after the RIE process. The “base” region of the nano-LED exhibits a “shallower” chemical/physical corrosion depth. Figure 2: micro electroluminescence map-ping, after the “conditioning” procedure, performed on nano-LEDs in an array with different annealing conditions: non-locally annealed E0 and locally E1 and E2 annealed.}, month = {Oct}, date = {2022-10-09}, organization = {International Workshop on Nitride Semiconductors, Berlin (Germany), 9 Oct 2022 - 14 Oct 2022}, subtyp = {After Call}, cin = {ER-C-2}, cid = {I:(DE-Juel1)ER-C-2-20170209}, pnm = {5353 - Understanding the Structural and Functional Behavior of Solid State Systems (POF4-535)}, pid = {G:(DE-HGF)POF4-5353}, typ = {PUB:(DE-HGF)6}, url = {https://juser.fz-juelich.de/record/943412}, }